Pressure Sensor with Corrugated Sidewall
Thanks to their biocompatibility and flexibility, microfabricated parylene-based implantable sensors have found a myriad of applications in medical devices. Implantable capacitive micro-pressure sensors are integrated with a miniaturized inductor for wireless pressure reading, making them useful blood pressure monitoring systems. However, geometrical constraints on the formation of a three-dimensional capacitive-cavity chamber, as well as inconsistent diaphragm deflection under a changing applied pressure, make current sensors prone to collapse during fabrication or operation.
Description
Researchers have developed a novel method of improving the structuring strength and stability of parylene-based microfabricated implantable capacitive sensors. Using a corrugated side wall pattern in place of a straight wall significantly reduces the possibility of membrane collapses during fabrication or operation. Stronger and safer sensors will enable real-time, wireless, implantable blood pressure monitoring systems.Applications
· Implantable, wireless, real-time blood pressure monitorsAdvantages
· Less prone to collapse than previous iterations· Improved functionality of diaphragm deflection
· Pressure sensing range of 200 mmHg is ideal for monitoring blood pressure